High gain device

ABSTRACT

A method of forming a device is disclosed. A substrate having a high gain (HG) device region for a HG transistor is provided. A HG gate is formed on the substrate in the HG device region. The HG gate includes sidewall spacers on its sidewalls. Heavily doped regions are formed adjacent to the HG gate. Inner edges of the heavily doped regions are aligned with about outer edges of the sidewall spacers of the HG gate. The heavily doped regions serve as HG source/drain (S/D) regions of the HG gate. The HG S/D regions do not include lightly doped drain (LDD) regions or halo regions.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a divisional application of co-pending U.S. patentapplication Ser. No. 13/655,431, filed on Oct. 18, 2012, which is herebyincorporated by reference in its entirety for all purposes.

BACKGROUND

Complementary Metal Oxide Semiconductor (CMOS) transistors have beenwidely employed. For example, CMOS transistors have been employed foranalog applications. Analog applications employ CMOS transistors withhigh gains. However, as CMOS technology migrates into the nano-regime,it has been found that gains of CMOS transistors become reduced,affecting its effectiveness.

The present disclosure relates to providing high gain transistors in thenanotechnology regime.

SUMMARY

Embodiments generally relate to semiconductor devices or integratedcircuits (ICs). In one embodiment, a method of forming a device isdisclosed. A substrate having a high gain (HG) device region for a HGtransistor is provided. A HG gate is formed on the substrate in the HGdevice region. The HG gate includes sidewall spacers on its sidewalls.Heavily doped regions are formed adjacent to the HG gate. Inner edges ofthe heavily doped regions are aligned with about outer edges of thesidewall spacers of the HG gate. The heavily doped regions serve as HGsource/drain (S/D) regions of the HG gate. The HG S/D regions do notinclude lightly doped drain (LDD) regions or halo regions.

In another embodiment, a method of forming a device is presented. Themethod includes providing a substrate having at least a first deviceregion for a first transistor and a second device region for a secondtransistor. A first gate is formed on the first device region and asecond gate is formed on the second device region. The gates includesidewall spacers on their sidewalls. Heavily doped regions are formedadjacent to the gates. Inner edges of the heavily doped regions arealigned with about outer edges of the sidewall spacers of the gates. Theheavily doped regions serve as source/drain (S/D) regions of the gates.The S/D regions of the second transistor do not include lightly dopeddrain (LDD) regions or halo regions.

In yet another embodiment, a device is disclosed. The device includes asubstrate having a high gain (HG) device region for a HG transistor. AHG gate is disposed on the substrate in the HG device region. The HGgate includes sidewall spacers on its sidewalls. Heavily doped regionsare disposed adjacent to the HG gate. Inner edges of the heavily dopedregions are aligned with about outer edges of the sidewall spacers ofthe HG gate. The heavily doped regions serve as HG source/drain (S/D)regions of the HG gate. The HG S/D regions do not include lightly dopeddrain (LDD) regions or halo regions.

These and other advantages and features of the embodiments hereindisclosed, will become apparent through reference to the followingdescription and the accompanying drawings. Furthermore, it is to beunderstood that the features of the various embodiments described hereinare not mutually exclusive and can exist in various combinations andpermutations.

BRIEF DESCRIPTION OF THE DRAWINGS

In the drawings, like reference characters generally refer to the sameparts throughout the different views. Also, the drawings are notnecessarily to scale, emphasis instead generally being placed uponillustrating the principles of the invention. In the followingdescription, various embodiments of the present invention are describedwith reference to the following drawings, in which:

FIG. 1 shows cross-sectional view of a portion of an embodiment of adevice;

FIGS. 2a-f show cross-sectional views of an embodiment of a process forforming a device; and

FIGS. 3a-b show graphs comparing the ID-VD plot for different NMOS andPMOS devices.

DETAILED DESCRIPTION

Embodiments generally relate to semiconductor devices or integratedcircuits (ICs). More particularly, some embodiments relate to high gaindevices. For example, high gain devices include transistors, such asmetal oxide transistors (MOS). The high gain devices can be employed inanalog applications, such as high DC gain amplifier, audio amplifier oraudio Codex. The high gain transistors can be easily integrated intodevices or ICs with core or digital devices. The devices or ICs can beincorporated into or used with, for example, consumer electronicproducts, and particularly portable consumer products such as, forexample, mobile phones, tablets, and PDAs.

FIG. 1 shows a cross-sectional view of a portion of an embodiment of adevice 100. The device, for example, is an IC. Other types of devicesmay also be useful. As shown, the device includes a substrate 101. Thesubstrate, for example, is a silicon substrate. Other types ofsubstrates, such as silicon germanium, germanium, gallium arsenide, orcrystal-on-insulator (COI) such as silicon-on-insulator (SOI), are alsouseful. The substrate may be a doped substrate. For example, thesubstrate can be lightly doped with p-type dopants. Providing asubstrate with other types of dopants or dopant concentrations, as wellas an undoped substrate, may also be useful.

The device may include doped regions having different dopantconcentrations. For example, the device may include heavily doped (x⁺),intermediately doped (x) and lightly doped (x⁻) regions, where x is thepolarity type which can be p or n. A lightly doped region may have adopant concentration of about 1E11-1E13/cm², and an intermediately dopedregion may have a dopant concentration of about 1E13-1E15/cm², and aheavily doped region may have a dopant concentration of about1E15-1E17/cm². Providing other dopant concentrations for the differenttypes of doped regions may also be useful. For example, the ranges maybe varied, depending on the technology node. P-type dopants may includeboron (B), aluminum (Al), indium (In) or a combination thereof, whilen-type dopants may include phosphorous (P), arsenic (As), antimony (Sb)or a combination thereof.

The substrate includes first and second device regions 105 a-b for firstand second transistors 110 and 140. In one embodiment, the first deviceregion is for a core transistor and the second device region is for ahigh gain (HG) transistor. The first device region may be disposed in acore or logic device region of the substrate and the second deviceregion may be disposed in an analog or HG device region. The substratemay also include regions for other types of circuitry, depending on thetype of device or IC. For example, the device may also include regionsfor intermediate voltage (IV) and high voltage (HV) devices as well asan array region for memory devices. In other embodiments, the firstdevice region may include a HV or IV device. Other configurations offirst and second device regions may also be useful.

Isolation regions may be provided for isolating or separating differentregions of the substrate. In one embodiment, the device regions areisolated from other regions by isolation regions 180. For example, anisolation region surrounds a device region. The isolation regions, forexample, are shallow trench isolation (STI) regions. Other types ofisolation regions may also be employed. For example, the isolationregions may be deep trench isolation (DTI) regions. The STI regions, forexample, extend to a depth of about 2000-5000 Å. Providing isolationregions which extend to other depths may also be useful.

A device well 112 may be disposed in a device region. In one embodiment,device wells are provided for first and second device regions. A devicewell is disposed within the isolation region. A depth of the devicewells may be about 0.5-5 μm. Other depths for the device wells may alsobe useful. In one embodiment, the device wells are doped with secondpolarity type dopants. For example, the device wells are doped withp-type dopants. Alternatively, the second polarity type dopants may ben-type. The device wells serve as bodies of the transistors. Forexample, the device well in the first device region serves as a body ofthe first transistor and the device well in the second device regionserves as a body of the second transistor. The dopant concentration ofthe device wells may be light to intermediate. For example, the dopantconcentration of the device wells may be about 5E12-5E13/cm². Otherdopant concentration for the device veils may also be useful.

The first transistor includes a first gate 125 on the surface of thesubstrate; the second transistor includes a second gate 155 on thesurface of the substrate. A gate, for example, includes a gate electrode136 over a gate dielectric 134. The gate electrode, for example, may bepolysilicon. The gate electrode may be about 700-5000 Å thick. Othertypes of gate electrodes as well as thicknesses may also be useful. Asfor the gate dielectric, it may be formed of silicon oxide. Thethickness of the gate dielectric may be, for example, about 10-40 Å.Other types of gate dielectrics or thicknesses may also be useful.

As shown, the thickness of the gate dielectrics for the transistors isthe same. For example, the first transistor is a core transistor. Inother embodiments, the transistors may have gate dielectrics ofdifferent thicknesses. For example, in the case where the firsttransistor is an IV or a HV transistor, the transistors may havedifferent gate dielectric thicknesses.

Dielectric sidewall spacers 138 are disposed on sidewalls of the gate.The sidewall spacers, for example, may be silicon oxide. Other types ofdielectric materials or combination of materials may be used for thespacers. It is understood that the first and second gates need not bethe same type of gates. For example, the various components of the firstand second gates may be formed of different materials or have differentconfigurations.

A length of a channel of a transistor is equal to the width of the gate.For example, the channel length of a transistor is equal to the width ofthe gate between its sidewalls. In one embodiment, the first transistorhas a gate width equal to a minimum feature size F. In one embodiment, Fis in the nano technology regime. In one embodiment, F is less than 0.18μm or 180 nm. In another embodiment, F is 0.13 μm or less. Providingother dimensions for F may also be useful. It is understood that thefirst and second gates need not be of the same width. It is furtherunderstood that a device may have different transistors with differentgate widths. For example, the channel length of the HG transistor isgreater than F. In one embodiment, the channel length of the HGtransistor may be about 1 μm or longer. The longer the channel length,the higher the output resistance for the HG transistor. Providing otherchannel lengths may also be useful, for example, depending on designrequirements. The gate may be a gate conductor which forms gates ofmultiple transistors. For example, the gate conductor may traverse aplurality of device regions separated by isolation regions. Thepluralities of transistors have a common gate formed by the gateconductor. Other configurations of gate conductors may also be useful.

The first transistor includes first doped regions 120 disposed in thesubstrate adjacent to the sides of the first gate. For example, a firstdoped region is disposed adjacent to about an outer edge of thedielectric sidewall spacer of the first gate and another first dopedregion is disposed adjacent to about an outer edge of the otherdielectric sidewall spacer of the first gate. The doped regions, forexample, are from the isolation regions to about the sides of the firstgate. In one embodiment, inner edges 121 of the doped regions arealigned with about outer edges of the dielectric sidewall spacers of thefirst gate. The doped regions, in one embodiment, are heavily doped withfirst polarity type dopants for a first type transistor. For example,the doped regions are heavily doped n-type (n⁺) regions for a n-typetransistor. Providing heavily doped p-type (p⁺) regions may also beuseful for a p-type transistor. The heavily doped regions, for example,have a dopant concentration of about 1E15-1E17/cm². Other dopantconcentrations for the doped regions may also be useful. The depth ofthe doped regions may be about 0.1-0.4 μm. Providing doped regionshaving other depths may also be useful. Additionally, it is notnecessary that the first doped regions have the same depth. The dopedregions serve as source/drain (S/D) regions of the transistor.

In one embodiment, the first transistor includes lightly doped drain(LDD) regions 124. As shown in FIG. 1, inner edges 124 a of the LDDregions adjacent to the sides of the gate are aligned with aboutsidewalls of the first gate. In one embodiment, the LDD region 124extends from the first doped regions to underlap the gate. The LDDregions should underlap the gate sufficiently so that the S/D regionsare in communication with the channel under the gate. The underlapportion may be, for example, about 0.004-0.04 μm. Providing an underlapportion which underlaps the gate by other amounts may also be useful.The LDD regions, in one embodiment, are lightly doped with firstpolarity type dopants for a first type transistor. For example, thedoped regions are lightly doped n-type (n⁻) regions for a n-typetransistor. Providing lightly doped p-type (p⁻) regions may also beuseful for a p-type transistor. The LDD regions, for example, have adopant concentration of about 5E13-5E15/cm². Other dopant concentrationsfor the doped regions may also be useful. The depth of the LDD regionsmay be about 0.05-0.3 μm. Providing LDD regions having other depths mayalso be useful.

Halo regions 126, in one embodiment, are provided in the substrate. Ahalo region, for example, extends under the gate beyond the LDD regions.The halo regions, for example, extend under the gate beyond the LDDregions and above the first doped regions. The underlap portion may be,for example, about 0.002-0.02 μm. Providing an underlap portion whichunderlaps the gate by other amounts may also be useful. In oneembodiment, the halo regions may be intermediately or heavily doped withsecond polarity type dopants. The halo regions, for example, may have adopant concentration of about 5E13-5E14/cm². Other dopant concentrationsfor the halo regions may also be useful.

As described, the second transistor is a HG transistor. The channellength of the second transistor, for example, may be at least about 0.5μm. Other channel length dimensions for the HG transistor may also beuseful. The second transistor includes second doped regions 150 disposedin the substrate adjacent to the sides of the second gate. For example,a second doped region is disposed adjacent to about an outer edge of thedielectric sidewall spacer of the second gate and another second dopedregion is disposed adjacent to about an outer edge of the otherdielectric sidewall spacer of the second gate. The second doped regions,for example, are from the isolation regions to about the sides of thesecond gate. In one embodiment, inner edges 151 of the second dopedregions are aligned with about outer edges of the dielectric sidewallspacers of the second gate. The second doped regions, in one embodiment,are heavily doped with first polarity type dopants for a first typetransistor. For example, the second doped regions are heavily dopedn-type (n⁺) regions for a n-type transistor. Providing heavily dopedp-type (p⁺) regions may also be useful for a p-type transistor. Theheavily doped regions, for example, have a dopant concentration of about1E15-1E17/cm². Other dopant concentrations for the doped regions mayalso be useful. The depth of the second doped regions may be about0.1-0.4 μm. Providing doped regions having other depths may also beuseful. The first and second doped regions need not have the same depth.The second doped regions serve as source/drain (S/D) regions of thesecond transistor.

In some embodiments, a dielectric etch stop layer (not shown) is formedover the transistors. The etch stop layer, for example, is a siliconnitride etch stop layer. Other types of etch stop layers may also beuseful. The etch stop layer should have a material which can beselectively removed from a dielectric layer thereover. The etch stoplayer facilitates in forming contact plugs to contact regions of thetransistor, such as the gate electrode and doped regions. In someembodiments, the etch stop layer may also serve as a stress layer forapplying a stress on the channel of the transistor to improveperformance.

Metal silicide contacts 172 and 173 may be formed on the S/D regions andon the gate electrodes. The metal silicide contacts, for example, may benickel-based contacts. Other types of metal silicide contacts may alsobe useful. For example, the metal silicide contact may be cobaltsilicide (CoSi). The silicide contacts nay be about 50-300 Å thick.Other thicknesses may also be useful. The metal silicide contacts may beemployed to reduce contact resistance and facilitate contact to theback-end-of-line metal interconnects. For example, a dielectric layer(not shown) may be provided over the transistors. Via contacts, such astungsten contacts, may be formed in the dielectric layer coupling thecontact regions of the transistors to metal lines disposed in metallayers of the device.

The gain of the device is defined by the following equation:Gain=G _(m) ×R _(out)where G_(m)=transconductance; and

R_(out)=output resistance.

-   We have found that, when there is a heavy halo doping in the    channel, it alters the band bending and influences the threshold    voltage of the transistor. As a result, channel length modulation,    drain induced barrier lowering (DIBL) and static feedback are    affected, lowering the gain of the device. As described, the second    or HG transistor, unlike the first transistor, is not provided with    LDD or halo regions. Thus, we have discovered that without LDD    and/or halo regions, the gain of the second transistor and the    device is improved.

FIGS. 2a-f show cross-sectional views of an embodiment of a process 200for forming a device. Referring to FIG. 2a , a substrate 101 isprovided. The substrate, in one embodiment, is a silicon substrate. Thesubstrate may be a doped substrate, such as a p⁻ substrate. Other typesof substrates, such as a germanium-based, gallium arsenide, COI such asSOI, or sapphire, may also be useful. The substrate may be doped withother types of dopants or dopant concentrations.

The substrate includes first and second device regions 105 a-b. In oneembodiment, the first device region is for a core or logic transistorand the second device region is for a high gain (HQ) transistor. Thesubstrate may also include regions for other types of circuitry,depending on the type of device or IC. For example, the device may alsoinclude regions for intermediate voltage (IV) and high voltage (HV)devices as well as an array region for memory devices.

The substrate is prepared with isolation regions 180 for isolating thedevice regions from other regions. For example, an isolation regionsurrounds a device region, isolating it from other device regions. Theisolation regions, for example, are STI regions. Other types ofisolation regions may also be useful. Various processes can be employedto form the STI regions. For example, the substrate can be etched usingetch and mask techniques to form trenches which are then filled withdielectric materials such as silicon oxide. Chemical mechanicalpolishing (CMP) can be performed to remove excess oxide and provide aplanar substrate top surface. Other processes or materials can also beused to form the STIs. The depth of the STI regions may be, for example,about 2000-5000 Å. Other depths for the STI regions may also be useful.

The substrate is prepared with device wells 112 in the first and seconddevice regions. The device wells may be formed by ion implantations. Toform the device wells, an implant mask (not shown) which exposes thedevice regions is used. The implant mask, for example, is a photoresistlayer patterned by a lithographic mask. The implant, for example,includes implanting second polarity type dopants into the substrate.

In one embodiment, the device wells are doped with second polarity typedopants. For example, the device wells are doped with p-type dopants.Alternatively, the second polarity type dopants may be n-type. Thedevice wells serve as bodies of the transistors. For example, the devicewell in the first device region serves as a body of the first transistorand the device well in the second device region serves as a body of thesecond transistor. A depth of the device wells may be about 0.5-5 μm.Other depths for the device wells may also be useful. The dopantconcentration of the device wells may be light to intermediate. Forexample, the dopant concentration of the device wells may be about5E12-5E13/cm². Other dopant concentration for the device wells may alsobe useful.

Referring to FIG. 2b , gate layers of the gates are formed on thesubstrate. In one embodiment, the gate layers include a gate dielectriclayer 234 on the substrate and a gate electrode layer 236 formedthereon.

In one embodiment, the gate dielectric layer is silicon oxide. Othertypes of gate dielectric, for example, high k gate dielectric, may alsobe useful. The thickness of the gate dielectric layer may be about 10-40Å. Other thicknesses may also be useful. The gate dielectric layer maybe formed by thermal oxidation. For example, the dielectric layer isformed by wet oxidation followed by annealing the substrate in anoxidizing ambient. The temperature of the wet oxidation can be, forexample, about 600-900° C. The annealing can be, for example, performedat a temperature of about 600-1000° C. Forming other types of gatedielectric layers or using other processes may also be useful.

As shown, the thickness of the gate dielectrics for the transistors isthe same. For example, the first transistor is a core transistor. Inother embodiments, the transistors may have gate dielectrics ofdifferent thicknesses. For example, in the case where the firsttransistor is an IV or a HV transistor, the transistors may havedifferent gate dielectric thicknesses. In such cases, the substrate maybe prepared to have different gate dielectric thicknesses in the firstand second device regions.

As for the gate electrode layer, it may be a silicon layer. The siliconlayer, for example, may be a polysilicon layer. The thickness of thegate electrode layer may be about 700-5000 Å. Other thickness may alsobe useful. The gate electrode layer may be formed by, for example,chemical vapor deposition. Other techniques for forming the gateelectrode layer may also be useful. The gate electrode layer can beformed as an amorphous or non-amorphous layer. In the case of anamorphous layer, an anneal may be performed to form a polycrystallinesilicon layer.

Other types of gate dielectric and gate electrode materials orthicknesses may also be useful. For example, the gate dielectricmaterial may be a high k dielectric material while the gate electrodemay be a metal gate electrode material. Other configuration of gatelayers may also be useful. For example, the gate dielectric and/or gateelectrode layers may have multiple layers. The layers can be formed byvarious techniques, such as thermal oxidation, CVD and sputtering.

In FIG. 2c , the gate layers are patterned to form first and secondgates 125 and 155 of first and second transistors. An etch mask may beemployed to pattern the gate layers to form the gates. For example, asoft mask, such as a photoresist layer, may be used. An exposure sourcemay selectively expose the photoresist layer through a reticlecontaining the desired pattern. After selectively exposing thephotoresist layer, it is developed to form openings corresponding tolocations when the gate layers are to be removed. To improvelithographic resolution, an anti-reflective coating (ARC) may be usedbelow the photoresist layer.

In other embodiments, the mask layer may be a hard mask layer. The hardmask layer, for example, may include TEOS or silicon nitride. Othertypes of hard mask materials may also be used. The hard mask layer maybe patterned using a soft mask, such as a photoresist.

An anisotropic etch, such as reactive ion etch (RIE) is performed usingthe etch mask to pattern the gate layers to form the gates. Other typesof etch processes may also be useful. In one embodiment, an RIE isemployed to pattern the gate layers to form the gates 125 and 155. Thegates, for example, may be gate conductors which serve as common gatesfor multiple transistors. Other configurations of the gate may also beuseful.

Referring to FIG. 2d , a mask 284 is formed on the substrate. The mask,for example, is a photoresist mask. Other types of masks may also beuseful. The mask is patterned to form an opening in the first deviceregion while protecting the second device region. The mask protects thesecond device region from subsequent processing.

An ion implantation is performed. The mask serves as an implant mask,preventing the second device region from the implant. In one embodiment,an implant is performed to form LDD regions 124 in the first deviceregion. The implant, for example, is an angled implant. First polaritytype dopants are implanted into the substrate to form the LDD regions124.

The implant, for example, may be for the LDD regions in the substratebetween the gate and isolation region in the first device region. Forexample, the implant may dope the substrate exposed by the implant maskbetween the first gate and the isolation region. The depth of the LDDregions, for example, may be about 0.05-0.3 μm. The implant dose may beabout 5E13-5E15/cm² and the implant energy may be about 0.1-200 KeV.Other implant parameters may also be useful. As shown in FIG. 2d , inneredges 124 a of the LDD regions adjacent to the sides of the gate arealigned with about sidewalls of the first gate 125. In one embodiment,the implant forms LDD regions which extend under the gate sidewalls. Forexample, the implant forms LDD regions which extend under the gate byabout 0.004-0.04 μm. Providing LDD regions which extend under the gateby other distances may also be useful.

An implant is performed to form halo regions. The implant, for example,is an angled implant. For example, the implant is performed at about20-45 degree with reference to the surface of the substrate. The haloregion, for example, extends under the gate beyond the LDD regions. Thehalo regions, for example, extend under the gate beyond the LDD regionsand are shallower than the later formed first doped regions 120. Theunderlap portion may be, for example, about 0.002-0.02 μm. Providing anunderlap portion which underlaps the gate by other amounts may also beuseful. The depth of the halo regions, for example, may be about0.07-0.4 μm. In one embodiment, the halo regions may be intermediate orheavily doped with second polarity dopants. The halo regions, forexample, may have a dopant concentration of about 5E13-5E14/cm². Otherdopant concentrations for the halo regions may also be useful. The haloregions, for example, have second polarity type dopants. The implant toform the halo regions may employ the same implant mask as the LDDregions. The implant to form the halo regions may be performed before orafter the implant to form the LDD regions. After the LDD and haloregions are formed, the implant mask is removed. The implant mask may beremoved by, for example, ashing. Other techniques for removing theimplant mask may also be useful. An anneal, such as rapid thermal anneal(RTA), is performed after the implant to activate the dopants in the LDDand halo regions.

As shown in FIG. 2e , sidewall spacers 138 are formed on the sidewallsof the gates. To form the sidewall spacers, a dielectric layer isdeposited on the substrate. The dielectric layer, for example, may besilicon oxide. Other types of dielectric material, such as siliconnitride, may also be used. The dielectric layer may be formed by CVD.The dielectric layer may also be formed using other techniques. Thethickness of the dielectric layer may be, for example, 100-1000 Å. Otherthickness for the dielectric layer may also be useful. The thickness,for example, may depend on the desired width of the spacers. Ananisotropic etch, such as RIE, may be performed to remove horizontalportions of the dielectric layer, leaving spacers on the sidewalls ofthe gate. In some applications, the spacers may be formed from multipledielectric layers.

First and second doped regions 120 and 150 are formed in the substrateadjacent to the first and second gates. The doped regions are heavilydoped regions having first polarity type dopants. An implant, forexample, is performed using an implant mask, such as a photoresist mask,to form the first polarity type first and second doped regions in thefirst and second device regions. For example, the implant may dope thesubstrate exposed by the implant mask between the gate with the spacersand the isolation regions. The implant forms first and second heavilydoped regions which have inner edges 121 and 151 that are aligned withabout outer edges of the dielectric sidewall spacers of the first andsecond gate. The depth of the heavily doped regions, for example, isabout 0.1-0.4 μm. The implant dose may be about 1E15-1E16/cm² and theimplant energy may be about 10-100 KeV. Other implant parameters mayalso be useful. The doped regions serve as source/drain (S/D) regions ofthe transistors. An anneal, such as RTA, is performed after the implantto activate the dopants in the S/D regions. The inner edges of the dopedregions, for example, may extend under the dielectric spacers due todiffusion of the dopants from the doped regions. The first and seconddoped regions, as described, are formed by the same implant. Forming thefirst and second doped regions by separate implant processes may also beuseful.

After forming the S/D regions, the implant mask is removed. The implantmask may be removed by, for example, ashing. Other techniques forremoving the implant mask may also be useful.

Referring to FIG. 2f , metal silicide contacts are formed on contactregions of the transistor. For example, the metal silicide contacts 172and 173 are formed on the gates and S/D regions of the transistors. Themetal silicide contacts, for example, are nickel based metal silicidecontacts. Other types of metal silicide contacts may also be useful. Themetal silicide contacts are used to facilitate low resistance contactsbetween the active substrate and the BEOL metal lines. In oneembodiment, the thickness of the salicide contacts is about 50-300 Å.Providing other thicknesses may also be useful.

To form the silicide contacts, a metal layer is deposited on the surfaceof the substrate. The metal layer, for example, may be nickel or analloy thereof. Other types of metallic layers, such as cobalt, or alloysthereof, including nickel, may also be used. The metal layer can beformed by Physical Vapor Deposition (PVD). Other types of metal layersand/or be formed by other types of processes can also be useful.

A anneal may be performed to cause a reaction between the metal and thesubstrate, forming a silicide layer. Excess metal not reacted in thesilicidation of the active surface is removed by, for example, a wetremoval process. For example, unreacted metal material is removedselective to the silicide contacts. Other techniques for forming thesilicide contacts may also be useful.

The process continues to form the device. The processing may includeforming a PMD layer and contacts to the terminals of the cell as well asone or more interconnect levels, final passivation, dicing, assembly andpackaging. Other processes may also be included. For example, othercomponents, such as low voltage, medium voltage, and high voltage I/Odevices can be formed prior to forming the interconnections.

The device formed by the process as described in FIGS. 2a-f , mayinclude some or all advantages as described with respect to FIG. 1. Assuch, these advantages will not be described or described in detail.Moreover, the process as described does not require additional or extramask compared with baseline processes. In addition, the device can beformed together with other baseline core devices.

FIGS. 3a-b show ID-VD graphs of different NMOS and PMOS devices of, forexample, the 0.13 μm technology node. The graphs plot drain current (ID)in amperes (A) versus drain voltage Vd in volts (V) of the devices.Lines 1 and 2 are devices having channel lengths of 0.5 μm and 10 μm,respectively, with LDD and halo regions; lines 3 and 4 are deviceshaving channel lengths of 0.5 μm and 10 μm, respectively without LDD andhalo regions. From the graphs, lines 1 and 2 show lower outputresistance than lines 3 and 4. For example, transistors without LDD andhalo regions exhibit much higher output resistance, and thus much highergain than those with LDD and halo regions. The gains of the transistorsare reflected in Tables 1a-b below:

TABLE 1a NMOS Gain ID = 10 μA Gain No LDD LP = 1.5 V LDD and Halo and noHalo Channel Length = 45 236 0.5 μm Channel Length = 57 1592 10 μm

TABLE 1b PMOS Gain ID = 10 μA Gain No LDD LP = 1.5 V LDD and Halo and noHalo Channel Length = 50 213 0.5 μm Channel Length = 81 816 10 μm

The invention may be embodied in other specific forms without departingfrom the spirit or essential characteristics thereof. The foregoingembodiments, therefore, are to be considered in all respectsillustrative rather than limiting the invention described herein. Scopeof the invention is thus indicated by the appended claims, rather thanby the foregoing description, and all changes that come within themeaning and range of equivalency of the claims are intended to beembraced braced therein.

What is claimed is:
 1. A device comprising: a substrate having a coredevice region for a low voltage core transistor and a high gain (HG)device region for a low voltage HG analog transistor; and a low voltagecore transistor disposed on the substrate in the core device region anda low voltage HG analog transistor disposed on the substrate in the HGdevice region, wherein the low voltage core and HG analog transistorscomprise a core gate and a HG gate having thin gate dielectric and gateelectrode layers, and the thin gate dielectric layers of the core gateand HG gate comprise the same thickness, first polarity type lightlydoped drain (LDD) regions disposed adjacent to the core gate, whereinthe first polarity type comprises n-type, and heavily doped firstpolarity type core source/drain (S/D) regions disposed adjacent to thecore gate and heavily doped first polarity type HG S/D regions disposedadjacent to the HG gate, wherein the core transistor includes core S/Dregions with LDD regions while the HG analog transistor includes HG S/Dregions without LDD regions such that output resistance of the HG analogtransistor is increased leading to higher gain.
 2. The device of claim 1wherein the low voltage HG analog transistor comprises a channel whichis disposed under the HG gate and the channel length of the HG gate isat least about 0.5 μm.
 3. The device of claim 2 wherein the low voltagecore transistor comprises a channel which is disposed under the coregate and the channel length of the core gate is less than 0.18 μm. 4.The device of claim 1 wherein the low voltage core transistor comprisesa channel which is disposed under the core gate and the channel lengthof the core gate is less than or about 0.13 μm.
 5. The device of claim 1wherein the low voltage HG analog transistor is a 1.5V low voltageanalog transistor.
 6. The device of claim 1 comprising sidewall spacersdisposed on sidewalls of the core gate and HG gate and wherein inneredges of the heavily doped core S/D regions and heavily doped HG S/Dregions are aligned with about outer edges of the sidewall spacers. 7.The device of claim 1 wherein the LDD regions in the core device regionare disposed adjacent to sides of the core gate and are aligned withabout sidewalls of the core gate.
 8. The device of claim 1 wherein theLDD regions extend from the heavily doped core S/D regions and underlapthe core gate.
 9. The device of claim 1 comprising second polarity typehalo regions disposed in the core device region of the substrate. 10.The device of claim 9 wherein the halo regions extend under the gatebeyond the LDD regions and are shallower than the heavily doped core S/Dregion.
 11. A device comprising: a substrate having a first deviceregion for a first transistor and a second device region for a secondtransistor, wherein the first transistor comprises a low voltage coretransistor and the second transistor comprises a low voltage high gain(HG) analog transistor, and wherein the first and second transistors aren-type transistors and comprise a first gate disposed on the substratein the first device region and a second gate disposed on the substratein the second device region, wherein the first and second gates comprisethin gate dielectric and gate electrode layers, and the thin gatedielectric layers of the first and second gates comprise the samethickness of about 10-40 Å, first polarity type lightly doped drain(LDD) regions disposed in the first device region, and first polaritytype heavily doped source/drain (S/D) regions disposed adjacent to thefirst and second gates, wherein the first transistor includes first S/Dregions with LDD regions and the second transistor includes second S/Dregions without LDD regions such that output resistance of the secondtransistor is increased leading to higher gain.
 12. The device of claim11 wherein the low voltage HG analog transistor comprises a channelwhich is disposed under the second gate and the channel length of thesecond gate is at least about 0.5 μm.
 13. The device of claim 11 whereininner edges of the first polarity type LDD regions are disposed adjacentto sides of the first gate and are aligned with about sidewalls of thefirst gate.
 14. The device of claim 11 wherein the LDD regions extendfrom the heavily doped first S/D regions and underlap the first gate.15. The device of claim 11 comprising second polarity type halo regionsdisposed in the first device region of the substrate.
 16. The device ofclaim 15 wherein the halo regions extend under the gate beyond the LDDregions and are shallower than the heavily doped first S/D regions. 17.A device comprising: a substrate having a core device region for a lowvoltage core transistor and a high gain (HG) device region for a lowvoltage HG analog transistor; and a low voltage core transistor disposedon the substrate in the core device region and a low voltage HG analogtransistor disposed on the substrate in the HG device region, whereinthe low voltage core and HG analog transistors comprise a core gatedisposed on the substrate in the core device region and a HG gatedisposed on the substrate in the HG device region, wherein the core gateand the HG gate comprise thin gate dielectric layers having the samethickness of about 10-40 Å, and wherein the low voltage core transistorcomprises a channel length which is less than or about 0.13 μm and thelow voltage HG analog transistor comprises a channel length which is atleast about 0.5 μm, and lightly doped drain (LDD) regions disposed onlyin the core device region while the HG device region is devoid of LDDregions such that output resistance of the HG analog transistor isincreased leading to higher gain.
 18. The device of claim 17 comprisingsidewall spacers disposed on sidewalls of the core gate and HG gate. 19.The device of claim 18 comprising heavily doped first polarity type coresource/drain (S/D) regions disposed adjacent to the core gate andheavily doped first polarity type HG S/D regions disposed adjacent tothe HG gate.
 20. The device of claim 19 wherein inner edges of theheavily doped S/D regions are aligned with about outer edges of thesidewall spacers of the core and HG gates.